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投稿日:2025年7月6日

Fundamentals of internal stress and adhesion improvement/evaluation methods for thin films and measures to prevent peeling problems

Thin films play a crucial role in various industries, serving as essential components in electronics, optics, and coatings.
Understanding the fundamentals of internal stress and improving adhesion in thin films is vital for enhancing their performance and preventing peeling problems.
In this article, we will delve into the basics of internal stress, methods to evaluate and improve adhesion, and measures to prevent peeling issues in thin films.

Understanding Internal Stress in Thin Films

Internal stress in thin films refers to the stress that is inherently present within the film without any external forces acting upon it.
This stress is generated during the deposition process and can significantly impact the film’s mechanical properties and performance.
Internal stress can be classified into two types: tensile and compressive stress.

Tensile Stress

Tensile stress occurs when the thin film is stretched, causing it to elongate.
This type of stress is common in materials that expand due to thermal effects or those subjected to mechanical stretching during deposition.
Excessive tensile stress can lead to cracking and debonding of the film from the substrate.

Compressive Stress

Compressive stress, on the other hand, arises when the film is compressed, causing it to contract.
This stress often results from the shrinkage of the film material upon cooling or due to the intrinsic properties of the deposited material.
Although compressive stress generally enhances adhesion, excessive compressive stress can lead to buckling or wrinkling of the film surface.

Methods for Evaluating Internal Stress

Evaluating internal stress in thin films is essential for predicting their reliability and performance.
A variety of methods exist to measure this stress accurately.

Curvature-Based Methods

Curvature-based methods involve measuring the curvature of a substrate before and after film deposition.
The change in curvature is related to the internal stress according to Stoney’s equation.
This non-destructive method is widely used for evaluating stress in thin films on flexible substrates.

X-ray Diffraction

X-ray diffraction (XRD) techniques can be employed to measure the lattice spacing changes caused by internal stress.
By analyzing the diffraction patterns, the stress state within the film can be determined.
XRD is highly accurate and suitable for crystalline thin films.

Raman Spectroscopy

Raman spectroscopy offers a non-destructive method to assess internal stress by measuring the shifts in Raman peaks.
The position of these peaks changes with stress, providing valuable insights into the film’s stress state.
This technique is particularly useful for thin films that are transparent or have a well-defined Raman signature.

Improving Adhesion in Thin Films

Adhesion between the thin film and the substrate is a critical factor influencing the film’s durability and performance.
Improving adhesion can mitigate peeling issues and enhance film integrity.

Surface Preparation

Preparing the substrate surface before deposition is a fundamental step to improve adhesion.
Cleaning the surface to remove contaminants and employing surface treatments such as plasma cleaning or chemical etching can increase the surface energy, promoting better adhesion.

Interlayer Deposition

Introducing an interlayer between the substrate and the thin film can improve adhesion by providing a compatible interface.
Materials such as chromium or titanium are frequently used as interlayers due to their strong adhesion properties.

Adjusting Deposition Parameters

Optimizing deposition parameters, such as temperature, pressure, and deposition rate, can significantly influence adhesion.
For example, increasing the substrate temperature during deposition can promote diffusion and chemical bonding between the film and substrate, enhancing adhesion.

Preventing Peeling Problems

Peeling of thin films can compromise their functionality and lead to device failure.
Implementing measures to prevent peeling is essential for ensuring the longevity and reliability of thin films.

Stress Management

Managing internal stress during the deposition process is crucial to prevent peeling.
Adjusting deposition parameters, such as reducing deposition rates or introducing post-deposition annealing, can help alleviate excessive stress and minimize peeling risks.

Environmental Considerations

Environmental factors such as temperature, humidity, and exposure to chemicals can impact thin film adhesion and induce peeling.
Protective coatings or encapsulation can help shield the film from environmental factors, maintaining adhesion and preventing peeling.

Material Selection

Choosing materials with compatible thermal expansion coefficients can reduce stress and peeling risk.
Materials that exhibit similar thermal behavior to the substrate can maintain stable adhesion even under thermal cycling conditions.

In conclusion, understanding and addressing the fundamentals of internal stress and adhesion in thin films are paramount for their effective application across various fields.
By employing accurate evaluation methods, enhancing adhesion, and implementing preventive measures against peeling, the reliability and performance of thin films can be significantly improved.
These strategies ensure that thin films remain robust components in modern technology, contributing to advancements in electronics, optics, and beyond.

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